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VARIAN
AXCELIS/EATON
AMAT
NOVELLUS
LAM
MISC
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CONTROLLER
PCB
MOTOR
LASER HEAD
RF GENERATOR
EQUIPMENT
VARIAN
AXCELIS/EATON
MISC
AXCELIS/EATON
P/N:11A2782
DESP:Cathode Assembly
P/N:7A0002/17096540
DESP: WAFER HOLDER GUIDE 3，6
P/N:17A0747/17096530
DESP:WAFER HOLDER GUIDE 1，6
P/N:17A0748/17096531
DESP:WAFER HOLDER GUIDE 2，6
P/N:5880-0108-3001
DESP:吸极面板Electrode Mounting Plate,Aluminum
P/N:1909860
DESP:Feedthrough 10KV
P/N:2555183
DESP:SPRING
P/N:398571
DESP:Plenum Gasket, Quartz Plate
P/N:440311
DESP:O-Ring, Quartz Plate
Total:1868
45/208
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