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P/N:0100-90889/0100-00467
DESP:靶盘定位控制板INDEX CONTROL BD
P/N:3003-97186
DESP:SHOE,PICK-UP,150MM 30DEG.3E/EX
P/N:0200-09626
DESP:Z48，Z49二氧化硅刻蚀专用硅环（有一个0.5mm小台阶）
P/N:3220-90007
DESP:COUPLING 1/4,BORE DELRIN ,ACCEL
P/N:0100-00991
DESP:电路板GAP SERVO PCB
P/N:1080-90078
DESP:MOTOR GEARED DC 0.9W,24V MRS
P/N:0020-98917
DESP:侧衬垫
P/N:0020-98916
DESP:底衬垫
P/N:0020-80070
DESP:SUPPORT BAR,ANTI-CATHODE反射屏电极夹
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