PRODUCTS

- SPARE PARTS
- - VARIAN
  - AXCELIS/EATON
  - AMAT
  - NOVELLUS
  - LAM
  - MISC
- REPAIR&REFURBISH
- - POWER SUPPLY
  - CONTROLLER
  - PCB
  - MOTOR
  - LASER HEAD
  - RF GENERATOR
- EQUIPMENT

P/N:0100-90889/0100-00467
DESP:靶盘定位控制板INDEX CONTROL BD

P/N:3003-97186
DESP:SHOE,PICK-UP,150MM 30DEG.3E/EX

P/N:0200-09626
DESP:Z48，Z49二氧化硅刻蚀专用硅环（有一个0.5mm小台阶）

P/N:3220-90007
DESP:COUPLING 1/4,BORE DELRIN ,ACCEL

P/N:0100-00991
DESP:电路板GAP SERVO PCB

P/N:1080-90078
DESP:MOTOR GEARED DC 0.9W,24V MRS

P/N:0020-98917
DESP:侧衬垫

P/N:0020-98916
DESP:底衬垫