PRODUCTS

- SPARE PARTS
- - VARIAN
  - AXCELIS/EATON
  - AMAT
  - NOVELLUS
  - LAM
  - MISC
- REPAIR&REFURBISH
- - POWER SUPPLY
  - CONTROLLER
  - PCB
  - MOTOR
  - LASER HEAD
  - RF GENERATOR
- EQUIPMENT

P/N:E17041180
DESP:Anode insulator rod

P/N:E17001810
DESP:SET UP,FARADAY,CUP,INSULATOR

P/N:E17094422
DESP:BASE PLATE,BERNAS ARC CHAMBER V810,SRC

P/N:E17122242
DESP:SHAFT SEAL, RETAINER

P/N:E17167330
DESP:PLATE GROUND

P/N:E17939243
DESP:COVER,LINER,GRAPHITE

P/N:E170185720
DESP:SHIELD,475MM,MPXL

P/N:E170185740
DESP:SHIELD,GRAPHITE,MPXL