PRODUCTS

- SPARE PARTS
- - VARIAN
  - AXCELIS/EATON
  - AMAT
  - NOVELLUS
  - LAM
  - MISC
- REPAIR&REFURBISH
- - POWER SUPPLY
  - CONTROLLER
  - PCB
  - MOTOR
  - LASER HEAD
  - RF GENERATOR
- EQUIPMENT

P/N:17253420
DESP:HEAT SHIELD GASKET

P/N:113941001
DESP:SPACER,ANODE CLAMP

P/N:113942001
DESP:SPACER,FILAMENT CLAMP

P/N:113944001
DESP:PLUG, GAS INLET

P/N:17128740
DESP:RING, SOURCE GRAPHITE FLANGE,E RING

P/N:104049002
DESP:BEAM,DUMPBLOCK,CENTER

P/N:17293110
DESP:ADAPTER RING,DISK FARADAY GRAPHITE SHIELD

P/N:17227050
DESP:APERTURE TERMINAL