PRODUCTS

- SPARE PARTS
- - VARIAN
  - AXCELIS/EATON
  - AMAT
  - NOVELLUS
  - LAM
  - MISC
- REPAIR&REFURBISH
- - POWER SUPPLY
  - CONTROLLER
  - PCB
  - MOTOR
  - LASER HEAD
  - RF GENERATOR
- EQUIPMENT

P/N:17100230/17263590
DESP:SOURCE FLANGE,FIXED CLAMP RING

P/N:17A8406
DESP:WAFER CHUCK (2)

P/N:17083060
DESP:FEEDTHRU

P/N:E17143760
DESP:RETAINING ROD

P/N:4400109
DESP:SCREW,#6-32*1-1/2 SHCS SST

P/N:12S1289
DESP:SOURCE BUSHING ( ULTRA)

P/N:11A9673
DESP:CATHODE ASSY,HE3 ,SRC,MO

P/N:E17158730
DESP:SHIELD,GRAPHITE,FARADAY APERTU,V810,RESOL