PRODUCTS

- SPARE PARTS
- - VARIAN
  - AXCELIS/EATON
  - AMAT
  - NOVELLUS
  - LAM
  - MISC
- REPAIR&REFURBISH
- - POWER SUPPLY
  - CONTROLLER
  - PCB
  - MOTOR
  - LASER HEAD
  - RF GENERATOR
- EQUIPMENT

P/N:E17152870
DESP:FOCUS ELECTRODE

P/N:E17158720
DESP:APERTURE, EXIT SHIELD GRAPHITE

P/N:E17158740
DESP:HOUSING, LINER GRAPHITE

P/N:E17167280
DESP:SPACER, BLOCK

P/N:E17248490
DESP:A CONE, CLAMPING

P/N:E17280880
DESP:ELECTRODE,SUPPRESSION

P/N:E17280890
DESP:ELECTRODE,GROUND,GRAPHITE

P/N:E17286670
DESP:HOOK ARC CHAMBER