PRODUCTS

- SPARE PARTS
- - VARIAN
  - AXCELIS/EATON
  - AMAT
  - NOVELLUS
  - LAM
  - MISC
- REPAIR&REFURBISH
- - POWER SUPPLY
  - CONTROLLER
  - PCB
  - MOTOR
  - LASER HEAD
  - RF GENERATOR
- EQUIPMENT

P/N:17D0487/17F5588
DESP:CATHODE SUPPORT PLATE

P/N:4400120/1231200204
DESP:抑制极出口石墨安装螺钉SHCS, # 2-56 X 1/4

P/N:4400084
DESP:抑制极陶瓷安装螺钉Flat Head Screw, 6-32X 3/8

P/N:112583001
DESP:MANIFOLD ASSY,SPILL OVER CUP

P/N:E35000239
DESP:O-RING,VITON,0.145

P/N:E35000502
DESP:O-RING,1/16 X5/64 ID

P/N:765-008372-001
DESP:解码器

P/N:5500007/GM8712-41/GM8212-41/1182510
DESP:MOTOR ASSY