PRODUCTS

- SPARE PARTS
- - VARIAN
  - AXCELIS/EATON
  - AMAT
  - NOVELLUS
  - LAM
  - MISC
- REPAIR&REFURBISH
- - POWER SUPPLY
  - CONTROLLER
  - PCB
  - MOTOR
  - LASER HEAD
  - RF GENERATOR
- EQUIPMENT

P/N:E17503510
DESP:VIISTA SHIELD GRAPHITE APERTURE EXIT

P/N:E17503500
DESP:VIISTA SHIELD GRAPHITE FARADAY APERTURE

P/N:E17056680
DESP:SPACER, MOUNTING SCA

P/N:AS-387-V-75-B-D/E35000304/E35000710
DESP:O-RING VITON 2-387

P/N:E17037064/E17037062
DESP:SHIELD,END PLATE,TOP,ARC CHAMBER-W

P/N:E17084910/E17123040/E11003020/E11044200
DESP:SOURCE BUSHING ASSY

P/N:E17037065/E17037063
DESP:SHIELD,END PLATE,BOTTOM

P/N:E35000088
DESP:O-RING,BUNA,3-3/8 ID