PRODUCTS

- SPARE PARTS
- - VARIAN
  - AXCELIS/EATON
  - AMAT
  - NOVELLUS
  - LAM
  - MISC
- REPAIR&REFURBISH
- - POWER SUPPLY
  - CONTROLLER
  - PCB
  - MOTOR
  - LASER HEAD
  - RF GENERATOR
- EQUIPMENT

P/N:006005501
DESP:SEAL,BELLOWS

P/N:15-00520-00
DESP:BUSHING,SEAL GUIDE

P/N:5032380
DESP:VALVE,SOLENOID,24VDC 4-WAY

P/N:M540-201-B1
DESP:SPEED CONTROL MOTOR

P/N:30R2BECI-D3
DESP:Bodine Electric Gearmotor

P/N:CPS 120-34 M1325F/87902031
DESP:Power Supply

P/N:1000520
DESP: 弧室

P/N:17D8646
DESP:离子源弧室盖板FRONT SLIT GSD-HE3