PRODUCTS

- SPARE PARTS
- - VARIAN
  - AXCELIS/EATON
  - AMAT
  - NOVELLUS
  - LAM
  - MISC
- REPAIR&REFURBISH
- - POWER SUPPLY
  - CONTROLLER
  - PCB
  - MOTOR
  - LASER HEAD
  - RF GENERATOR
- EQUIPMENT

P/N:E170139550
DESP:EPM 1.61,ROD SUPPORT

P/N:E170182840
DESP:EPM 1.61 ENT TUNNEL TOP ROD SUPPORT

P/N:E170194480
DESP:SHIELD,PROFILER SHAFT

P/N:E170215030
DESP:EXIT ROD SUPPORT,EPM 1.61,LEFT

P/N:E170215040
DESP:EXIT ROD SUPPORT,EPM 1.61,RIGHT

P/N:1236200603
DESP:SCREW, CAP BUTTON HEAD,VHCS ELE METAL

P/N:E170109940
DESP:EPM 1.5,ENTRANCE AP

P/N:E170138670
DESP:EPM 1.61,ENTRANCE APERTURE,ROD