PRODUCTS

- SPARE PARTS
- - VARIAN
  - AXCELIS/EATON
  - AMAT
  - NOVELLUS
  - LAM
  - MISC
- REPAIR&REFURBISH
- - POWER SUPPLY
  - CONTROLLER
  - PCB
  - MOTOR
  - LASER HEAD
  - RF GENERATOR
- EQUIPMENT

P/N:1520510
DESP:General IO DI BOARD

P/N:0020-98878
DESP:Insert Inner Flight Tube扁管出口内石墨板

P/N:0020-98879
DESP:Insert Neutral Flight Tube偏管直射石墨板

P/N:0020-98877
DESP:扁管出口外石墨板

P/N:0100-90889/0100-00467
DESP:靶盘定位控制板INDEX CONTROL BD

P/N:3003-97186
DESP:SHOE,PICK-UP,150MM 30DEG.3E/EX

P/N:486351
DESP:RF SCREEN SPACER ASSY

P/N:1340A
DESP:X-Y DISPLAY,HP