PRODUCTS

- SPARE PARTS
- - VARIAN
  - AXCELIS/EATON
  - AMAT
  - NOVELLUS
  - LAM
  - MISC
- REPAIR&REFURBISH
- - POWER SUPPLY
  - CONTROLLER
  - PCB
  - MOTOR
  - LASER HEAD
  - RF GENERATOR
- EQUIPMENT

P/N:E17266260
DESP:SHIELD.TOP.SOURCE CHAMBER

P/N:E17078180
DESP:E17078180

P/N:E17073780
DESP:E17073780

P/N:E17170013
DESP:HOUSING ASSY,GRAPHITE INSERT

P/N:E17080200
DESP:SHIELD,GRAPH,FRONT

P/N:E17136960
DESP:GROUND,FIRST,APERTURE,LENS

P/N:E17134870
DESP:E17134870

P/N:E17062530
DESP:APERTURE,ENTRANCE