PRODUCTS

- SPARE PARTS
- - VARIAN
  - AXCELIS/EATON
  - AMAT
  - NOVELLUS
  - LAM
  - MISC
- REPAIR&REFURBISH
- - POWER SUPPLY
  - CONTROLLER
  - PCB
  - MOTOR
  - LASER HEAD
  - RF GENERATOR
- EQUIPMENT

P/N:4100230
DESP:Timing Belt, Resonator

P/N:4200277
DESP:BEARING SELF LUB

P/N:4200279
DESP:Ball Bearing, Resonator

P/N:1178980
DESP:MOTOR ASSY, RESONATOR

P/N:11000380
DESP:Resonator Cone Assy

P/N:11031030
DESP:CONNECTOR FEEDTHRU ASSY

P/N:17031120
DESP:Coil Drive Nut

P/N:17031140
DESP:Bellows Assembly