PRODUCTS

- SPARE PARTS
- - VARIAN
  - AXCELIS/EATON
  - AMAT
  - NOVELLUS
  - LAM
  - MISC
- REPAIR&REFURBISH
- - POWER SUPPLY
  - CONTROLLER
  - PCB
  - MOTOR
  - LASER HEAD
  - RF GENERATOR
- EQUIPMENT

P/N:E17154380
DESP:PULLEY,DRIVER,ENCODER/RESOLVER

P/N:E35000186
DESP:O-RING,BUNA,21 ID

P/N:2542275
DESP:O-RING VITON,10.484ID*0.139w

P/N:2542394
DESP:O-RING，VITON, 24.94

P/N:E48000014
DESP:WASHER,SPLIT LOCK,3/8

P/N:E16029950
DESP:SENSOR ASSY,WAFER LIFT,ACTUATOR

P/N:E17001611
DESP:SHIELDING CUP,SUPPRESSION FEEDTHRU,MANIP

P/N:112587002
DESP:PLATE,COOLING,SPILL OVER CUP W/COAT