PRODUCTS

- SPARE PARTS
- - VARIAN
  - AXCELIS/EATON
  - AMAT
  - NOVELLUS
  - LAM
  - MISC
- REPAIR&REFURBISH
- - POWER SUPPLY
  - CONTROLLER
  - PCB
  - MOTOR
  - LASER HEAD
  - RF GENERATOR
- EQUIPMENT

P/N:854-002028-001
DESP:Lam490,ASSY motor/gear cap drive

P/N:22-00239-00
DESP:O-RING

P/N:22-00344-00
DESP:O-RING

P/N:A06955001
DESP:PIVOT PIN

P/N:60-00055-00/275185/CVG101GG
DESP:GAUGE,VAC,TUBE

P/N:E15000031/E15000034
DESP:PCB ASSY,DIGITAL INPUT-OUTPUT

P/N:1711261
DESP:Large Cup

P/N:b12008494 /51018
DESP:Gas Feed Tube