PRODUCTS

- SPARE PARTS
- - VARIAN
  - AXCELIS/EATON
  - AMAT
  - NOVELLUS
  - LAM
  - MISC
- REPAIR&REFURBISH
- - POWER SUPPLY
  - CONTROLLER
  - PCB
  - MOTOR
  - LASER HEAD
  - RF GENERATOR
- EQUIPMENT

P/N:17121750
DESP:INNER CUP SHIELD

P/N:4001167
DESP:SPRING RETAINING ROD INCONEL

P/N:17127640
DESP:Arc Chamber Mounting Screw

P/N:17124410
DESP:Spacer, Alumina

P/N:4001166
DESP:Shoulder Screw Spring

P/N:17287680
DESP:FLANGE SEAL

P/N:17270640/17033140/4001301
DESP:SPRING COMPRESSION SOURCE

P/N:17165580
DESP:ARC SLIT 20R MOLY ELS/IAS