PRODUCTS

- SPARE PARTS
- - VARIAN
  - AXCELIS/EATON
  - AMAT
  - NOVELLUS
  - LAM
  - MISC
- REPAIR&REFURBISH
- - POWER SUPPLY
  - CONTROLLER
  - PCB
  - MOTOR
  - LASER HEAD
  - RF GENERATOR
- EQUIPMENT

P/N:0040-95323/0040-96169
DESP:SHAFT BELLOW ASSY

P/N:0100-90945
DESP:TILT ANGLE CONTROL

P/N:0020-82035
DESP:PFG灯丝座绝缘子

P/N:0020-84219
DESP:弧室发射缝半边石墨件

P/N:0020-81482
DESP:离子源单孔端电子反射屏

P/N:0020-98914
DESP:离子源灯丝端电子反射屏

P/N:0995-10590
DESP:0995-10590

P/N:0020-09373
DESP:SEAL SMALL FACE