PRODUCTS

- SPARE PARTS
- - VARIAN
  - AXCELIS/EATON
  - AMAT
  - NOVELLUS
  - LAM
  - MISC
- REPAIR&REFURBISH
- - POWER SUPPLY
  - CONTROLLER
  - PCB
  - MOTOR
  - LASER HEAD
  - RF GENERATOR
- EQUIPMENT

P/N:17B4395
DESP:Faraday Side cover

P/N:17C5136
DESP:Feedthrough Holder(1)

P/N:17C5137
DESP:Feedthrough Holder(2)

P/N:17C7787
DESP:LINER, BEAM GUIDE

P/N:1152240
DESP:HEAT SHIELD ASSY

P/N:103289001/E112511564
DESP:PIN, ROTARY UNION

P/N:E17089940
DESP:SUPPORT, ARC CHAMBER, CENTER

P/N:E17089931
DESP:SUPPORT,ARC CHAMBER,RH