PRODUCTS

- SPARE PARTS
- - VARIAN
  - AXCELIS/EATON
  - AMAT
  - NOVELLUS
  - LAM
  - MISC
- REPAIR&REFURBISH
- - POWER SUPPLY
  - CONTROLLER
  - PCB
  - MOTOR
  - LASER HEAD
  - RF GENERATOR
- EQUIPMENT

P/N:101978002
DESP:ROTARY HOUSING

P/N:101975001
DESP:HOUSING,NUT UNIT

P/N:112328001
DESP:BEARING LUBRICATED

P/N:103442002
DESP:NUT,PRELOAD-LOAD LOCK

P/N:E17036620
DESP:COLUMN,26 SLOT CASSETTE

P/N:E16032530
DESP:HARNESS ASSY,WAFER SLIP NIPPLE ADAPTER FEEDTHRU

P/N:111661001
DESP:HARNESS ASSY,WAFER PRESENCE,LOAD LOCK,W3

P/N:103353001/4824003
DESP:DIODE,PIN PHOTO,SPECTRAL RANGE 400-1100MM,MAX&850MM,150MW