PRODUCTS

- SPARE PARTS
- - VARIAN
  - AXCELIS/EATON
  - AMAT
  - NOVELLUS
  - LAM
  - MISC
- REPAIR&REFURBISH
- - POWER SUPPLY
  - CONTROLLER
  - PCB
  - MOTOR
  - LASER HEAD
  - RF GENERATOR
- EQUIPMENT

P/N:11A8859
DESP:200MM,GUIDE(1),ARM HE3

P/N:11A8860
DESP:200MM GUIDE(2),ARM HE3

P/N:17A4292
DESP:BEAM PLATE

P/N:17A9686A
DESP:VACUUM CHUCK (SHUTTLE)

P/N:17B3449
DESP:BLANK-OFF PLATE

P/N:17B7652
DESP:GROUND ELECTRODE

P/N:17B7717
DESP:ELECTRODE,SUPPRESSION

P/N:17B7767
DESP:INSULATOR