PRODUCTS

- SPARE PARTS
- - VARIAN
  - AXCELIS/EATON
  - AMAT
  - NOVELLUS
  - LAM
  - MISC
- REPAIR&REFURBISH
- - POWER SUPPLY
  - CONTROLLER
  - PCB
  - MOTOR
  - LASER HEAD
  - RF GENERATOR
- EQUIPMENT

P/N:0020-85831A
DESP:AMU

P/N:0020-86280
DESP:ELECTRODE SUPPRESSION

P/N:0020-86733
DESP:FILAMENT CLAMP,R/H

P/N:0020-86734
DESP:FILAMENT CLAMP,L/H

P/N:0020-98787
DESP:GROUND ELECTRODE

P/N:0020-98788
DESP:SUPPRESSION ELECTRODE

P/N:0020-98917G
DESP:LINER SLIDE

P/N:17099460
DESP:CENTER POLE UPPER