PRODUCTS

- SPARE PARTS
- - VARIAN
  - AXCELIS/EATON
  - AMAT
  - NOVELLUS
  - LAM
  - MISC
- REPAIR&REFURBISH
- - POWER SUPPLY
  - CONTROLLER
  - PCB
  - MOTOR
  - LASER HEAD
  - RF GENERATOR
- EQUIPMENT

P/N:0021-90763
DESP:SHIELD, GRAPHITE (55X35)

P/N:E17398810
DESP:APERTURE,VARIABLE,VHCS RESO

P/N:E17290150
DESP:Source coil assy graphite,VHCS SRC CH

P/N:E17178670
DESP:GRAPHITE,LONG ,PFG

P/N:E17045790
DESP:APERTURE

P/N:E17134460
DESP:SHIELD,GRAPHITE,,V810,SETUP

P/N:17370590
DESP:Liner Pump Chamber

P/N:17370580
DESP:Liner, Magnet Duct