PRODUCTS

- SPARE PARTS
- - VARIAN
  - AXCELIS/EATON
  - AMAT
  - NOVELLUS
  - LAM
  - MISC
- REPAIR&REFURBISH
- - POWER SUPPLY
  - CONTROLLER
  - PCB
  - MOTOR
  - LASER HEAD
  - RF GENERATOR
- EQUIPMENT

P/N:17C7699
DESP:AMU INNER LINER(3)

P/N:17C7700
DESP:AMU OUTER LINER(1)

P/N:17C9463
DESP:GRAPHITE BOTTOM PLATE

P/N:17B8694
DESP:GRAPHITE

P/N:17D7585
DESP:MAGNETIC TUNNEL BOTTOM GRAPHITE SHIELD WS459

P/N:17D7606
DESP:NO3. APERTURE

P/N:17E0078
DESP:SOURCE DEFINING APERTURE

P/N:17E1921
DESP:Q LENS GRAPHITE PLATE