PRODUCTS

- SPARE PARTS
- - VARIAN
  - AXCELIS/EATON
  - AMAT
  - NOVELLUS
  - LAM
  - MISC
- REPAIR&REFURBISH
- - POWER SUPPLY
  - CONTROLLER
  - PCB
  - MOTOR
  - LASER HEAD
  - RF GENERATOR
- EQUIPMENT

P/N:7121-0013-0001
DESP: NV8200P BEAM Shutter Assembly

P/N:1174750/99601
DESP:Extraction Electrode Ground Cable

P/N:11A2782
DESP:Cathode Assembly

P/N:17A0002/17096540
DESP: WAFER HOLDER GUIDE 3，6

P/N:17A0747/17096530
DESP:WAFER HOLDER GUIDE 1，6

P/N:17A0748/17096531
DESP:WAFER HOLDER GUIDE 2，6

P/N:5880-0108-3001
DESP:吸极面板Electrode Mounting Plate,Aluminum

P/N:1909860
DESP:Feedthrough 10KV