PRODUCTS

- SPARE PARTS
- - VARIAN
  - AXCELIS/EATON
  - AMAT
  - NOVELLUS
  - LAM
  - MISC
- REPAIR&REFURBISH
- - POWER SUPPLY
  - CONTROLLER
  - PCB
  - MOTOR
  - LASER HEAD
  - RF GENERATOR
- EQUIPMENT

P/N:17D5181/17270060
DESP:FEM BLOCK(1) EQ2020S

P/N:17D5182/17270080
DESP:FEM BLOCK(2)

P/N:17D5183/17270090
DESP:FEM BLOCK(3)

P/N:17D5186/17270120
DESP:FEM BOLT HEAD SHIELD

P/N:17D5174
DESP:FEM BOLT HEAD SHIELD

P/N:1700230
DESP:Vespel Feed-thru

P/N:17062932
DESP:Graphite Liner Block

P/N:17062934
DESP:Graphite Liner Block