PRODUCTS

- SPARE PARTS
- - VARIAN
  - AXCELIS/EATON
  - AMAT
  - NOVELLUS
  - LAM
  - MISC
- REPAIR&REFURBISH
- - POWER SUPPLY
  - CONTROLLER
  - PCB
  - MOTOR
  - LASER HEAD
  - RF GENERATOR
- EQUIPMENT

P/N:E17266280
DESP:SHIELD,FRONT,SOURCE CHAMBER

P/N:E11005800
DESP:SECS-INTERFACE ASSY,7.5

P/N:E78000134
DESP:HOSE,FLEXMET,VCO,14

P/N:E17132330
DESP:MANIF SOURC PUMP W/G

P/N:E17124160
DESP:BODY,BEAMGATE

P/N:E60000154
DESP:SENSOR,RFLCTV,9-15MM

P/N:E17145620
DESP:KIT,BRACKET,REPLACEM

P/N:1236200805
DESP:SCREW, CAP BUTTON HEAD