PRODUCTS

- SPARE PARTS
- - VARIAN
  - AXCELIS/EATON
  - AMAT
  - NOVELLUS
  - LAM
  - MISC
- REPAIR&REFURBISH
- - POWER SUPPLY
  - CONTROLLER
  - PCB
  - MOTOR
  - LASER HEAD
  - RF GENERATOR
- EQUIPMENT

P/N:17189150
DESP:PLATE CATHODE SUPPORT GRAPHITE

P/N:17128230
DESP:SHOULDER SCREW SPACER STEATITE

P/N:1910710/1910760
DESP:FEEDTHRU POWER ELECTRICAL ELS/CATHODE FEED-THRU

P/N:17S3632
DESP:EXIT GRAPHITE

P/N:50-0002-05
DESP:FELL PROBE HEAD (TYPE D)

P/N:17A3602/17099700
DESP:HOLDER CHUCK GUIDE (2)

P/N:17A7181/17098180
DESP:HOLDER CHUCK GUIDE (1)

P/N:17A3566/17098370
DESP:ARM CHUCK GUIDE (1)