PRODUCTS

- SPARE PARTS
- - VARIAN
  - AXCELIS/EATON
  - AMAT
  - NOVELLUS
  - LAM
  - MISC
- REPAIR&REFURBISH
- - POWER SUPPLY
  - CONTROLLER
  - PCB
  - MOTOR
  - LASER HEAD
  - RF GENERATOR
- EQUIPMENT

P/N:E17328580-5P2
DESP:UPGRADE INSERT,GRAPHITE BEAMGATE

P/N:E11054520/E11054521
DESP:HALL PROBE ASSY

P/N:E17080660
DESP:MANIFOLD,DISTRIBUTION

P/N:E17151480
DESP: LINER, BOTTOM POLE ,V810,AMU

P/N:E17175170
DESP:LINER,WEDGE,FRONT

P/N:E17175180
DESP:LINER,WEDGE,REAR

P/N:E17324090
DESP:CUP SHIELD,GRAPHITE

P/N:E17825820
DESP:CLAMP,FLMNT,LT,2PC,2PIN,MOLY