PRODUCTS

- SPARE PARTS
- - VARIAN
  - AXCELIS/EATON
  - AMAT
  - NOVELLUS
  - LAM
  - MISC
- REPAIR&REFURBISH
- - POWER SUPPLY
  - CONTROLLER
  - PCB
  - MOTOR
  - LASER HEAD
  - RF GENERATOR
- EQUIPMENT

P/N:05-00022-00
DESP:PUMP REBUILD KIT

P/N:03-00289-00
DESP:CABLE ASSY

P/N:15-00401-00
DESP:SHAFT SPINDLE ASSY

P/N:03-00128-00
DESP:CABLE ASSY

P/N:15-00520-00
DESP:BUSHING,SEAL GUIDE

P/N:15-00399-04
DESP:轴固定螺丝

P/N:15-00742-00/N-150074200-Z
DESP:热偶瓷套管

P/N:19-00056-00
DESP:加热电极