PRODUCTS

- SPARE PARTS
- - VARIAN
  - AXCELIS/EATON
  - AMAT
  - NOVELLUS
  - LAM
  - MISC
- REPAIR&REFURBISH
- - POWER SUPPLY
  - CONTROLLER
  - PCB
  - MOTOR
  - LASER HEAD
  - RF GENERATOR
- EQUIPMENT

DESP: Arc Chamber

P/N: F5392001/F4714001

OEM:	Axcelis
Conditions:	OEM NEW
Availability :	2EA

Last Updated:Nov-24th-2025

Arc Chamber F5392001/F4714001