PRODUCTS

- SPARE PARTS
- - VARIAN
  - AXCELIS/EATON
  - AMAT
  - NOVELLUS
  - LAM
  - MISC
- REPAIR&REFURBISH
- - POWER SUPPLY
  - CONTROLLER
  - PCB
  - MOTOR
  - LASER HEAD
  - RF GENERATOR
- EQUIPMENT

DESP: GSi VGME-512-3 rev C

P/N: VGME-512

OEM:	OTHERS
Conditions:	OEM NEW
Availability :	1EA

Last Updated:Jan-12th-2026

GSi VGME-512-3 rev C VGME-512