PRODUCTS

- SPARE PARTS
- - VARIAN
  - AXCELIS/EATON
  - AMAT
  - NOVELLUS
  - LAM
  - MISC
- REPAIR&REFURBISH
- - POWER SUPPLY
  - CONTROLLER
  - PCB
  - MOTOR
  - LASER HEAD
  - RF GENERATOR
- EQUIPMENT

DESP: Lam490,ASSY motor/gear cap drive

P/N: 854-002028-001

OEM:	LAM
Conditions:	OEM NEW
Availability :	1EA

Last Updated:Oct-7th-2025

Lam490,ASSY motor/gear cap drive 854-002028-001